semiconductor manufacturing

6 papers

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Co-occurring keywords

reinforcement learning (4122) virtual metrology (1) process monitoring (2) knowledge distillation (3680) deep learning (2111) deep neural network (1801) interpretable model (158) diffusion transformer (185) mask optimization (4) alternating least square (24)

Papers

Human Interpretable Virtual Metrology in the Semiconductor Manufacturing AAAI 2025

Photolithography Overlay Map Generation with Implicit Knowledge Distillation Diffusion Transformer ICCV 2025

Intelligent OPC Engineer Assistant for Semiconductor Manufacturing AAAI 2025

LithoBench: Benchmarking AI Computational Lithography for Semiconductor Manufacturing NIPS 2023

Scalable ML Methods to Optimize KPIs in Real-World Manufacturing Processes IJCAI 2022

Tensorial Change Analysis Using Probabilistic Tensor Regression AAAI 2019