process monitoring

2 papers

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Co-occurring keywords

virtual metrology (1) semiconductor manufacturing (6) time series classification (97) support vector machine (976) interpretable model (158) random forest (325) random forest classifier (18) explainable prediction (12) kernel methods (1096) manufacturing process (5)

Papers

Human Interpretable Virtual Metrology in the Semiconductor Manufacturing AAAI 2025

SAX Breakpoints for Random Forest Based Real-Time Contrast Control Chart AAAI 2019