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process monitoring
2 papers
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Co-occurring keywords
virtual metrology
(1)
semiconductor manufacturing
(6)
time series classification
(97)
support vector machine
(976)
interpretable model
(158)
random forest
(325)
random forest classifier
(18)
explainable prediction
(12)
kernel methods
(1096)
manufacturing process
(5)
Papers
Human Interpretable Virtual Metrology in the Semiconductor Manufacturing
AAAI 2025
SAX Breakpoints for Random Forest Based Real-Time Contrast Control Chart
AAAI 2019
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