conftrace_

computational lithography

2 papers

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Co-occurring keywords · papers mentioning both

mask optimization (2) lithography simulation (1) inverse lithography (1) optical diffraction (1) deep neural network (1) convolutional neural network (1) deep learning (1) semiconductor manufacturing (1)

Papers

Optical Diffraction-based Convolution for Semiconductor Lithography CVPR 2026 LithoBench: Benchmarking AI Computational Lithography for Semiconductor Manufacturing NeurIPS 2023