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semiconductor manufacturing

6 papers

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Co-occurring keywords · papers mentioning both

reinforcement learning (2) virtual metrology (1) process monitoring (1) knowledge distillation (1) deep learning (1) deep neural network (1) interpretable model (1) diffusion transformer (1) mask optimization (1) alternating least square (1)

Papers

Human Interpretable Virtual Metrology in the Semiconductor Manufacturing AAAI 2025 Intelligent OPC Engineer Assistant for Semiconductor Manufacturing AAAI 2025 Photolithography Overlay Map Generation with Implicit Knowledge Distillation Diffusion Transformer ICCV 2025 LithoBench: Benchmarking AI Computational Lithography for Semiconductor Manufacturing NeurIPS 2023 Scalable ML Methods to Optimize KPIs in Real-World Manufacturing Processes IJCAI 2022 Tensorial Change Analysis Using Probabilistic Tensor Regression AAAI 2019