conftrace_

process monitoring

3 papers

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Co-occurring keywords · papers mentioning both

virtual metrology (1) semiconductor manufacturing (1) time series classification (1) support vector machine (1) interpretable model (1) random forest (1) influence diagram (1) random forest classifier (1) explainable prediction (1) kernel methods (1)

Papers

Human Interpretable Virtual Metrology in the Semiconductor Manufacturing AAAI 2025 Limited Memory Influence Diagrams for Attribute Statistical Process Control with Variable Sample Sizes PGM 2022 SAX Breakpoints for Random Forest Based Real-Time Contrast Control Chart AAAI 2019